As the semiconductor industry advances towards ever-smaller and more powerful chips – which are increasingly essential due to advances in artificial intelligence – extreme ultraviolet (EUV) lithography has become key to high-precision manufacturing. However, maintaining defect-free production remains a significant challenge. Carbon nanotube (CNT) membranes are a promising solution, offering superior protection against contamination while improving efficiency and precision.

The Role of EUV Pellicles in Semiconductor Manufacturing

EUV lithography enables the creation of ultra-fine patterns on silicon wafers, allowing for greater miniaturisation of transistors. A crucial component in this process is the EUV pellicle: a thin, transparent membrane that shields the photomask from contaminants. Without effective pellicles, even microscopic particles can cause defects, leading to costly production failures.

However, pellicle materials struggle to withstand the extreme conditions inside high-power EUV scanners. Exposure to high temperatures and vacuum conditions can cause warping, degradation, or even breakage, compromising both the mask and the scanner.

Why Carbon Nanotubes Are the Ideal Solution

CNT-based EUV pellicles offer several key advantages over conventional materials. Their ultra-thin structure allows for:

- High transmittance – CNTs maximise the EUV light passing through to the wafer.

- Low flare – CNTs reduce light scattering to ensure precise patterning.

- Exceptional thermal stability – CNTs can withstand the extreme conditions of high-power EUV lithography.

These properties make CNT membranes a promising material for ensuring cleaner, more reliable chip production.

Enabling High-Precision, High-Yield Manufacturing

With semiconductor giants investing in High Numerical Aperture (High-NA) EUV scanners, which will work at powers in excess of 500 W, the demand for robust pellicle materials is higher than ever. CNT pellicles not only help reduce defects but also improve production efficiency, increasing the number of wafers processed per hour.

As the industry continues to evolve, CNT-based pellicles are expected to play a central role in advancing semiconductor manufacturing and supporting the production of smaller, faster, and more reliable chips.

To read the full article, written by Juha Kokkonen, CEO of Canatu, click the link below:

How Carbon Nanotubes Can Transform the Semiconductor Industry